Surface-Micromachined Optical Fabry-Perot Ultrasound Sensor and Array

  • Fiber-optic sensor probes
  • Photoacoustic imaging
  • Ultrasound transducer array
  • Abstract
  • Overview

3D ultrasound and photoacoustic tomography are very useful non-destructive or non-invasive imaging modalities with a wide range of applications. However, current 3D ultrasound and photoacoustic imaging systems suffer from slow imaging speed, low detection sensitivity, and high complexity and cost. To address this issue and allow high-speed data acquisition, large-scale 2D ultrasound transducer arrays that have high detection sensitivity and easy to interface, are needed.


This technology is a large-scale 2D optical ultrasound transducer array based on the Fabry-Perot interferometry. Each transducer element consists of a hollow Fabry-Perot cavity that can convert ambient pressure changes (e.g., pressure, ultrasound wave) into variations in its optical reflectance. Formed by surface micromachining, all the transducer elements have highly uniform optical and acoustic properties. Their output light signals can be optically read out simultaneously or in parallel by an optical detector array, e.g., a CCD camera, with no electrical wiring. Such capability can be utilized to enable high-speed 3D ultrasound and photoacoustic imaging.

Contact Information

Name: Shyamala Rajagopalan


Phone: 979-862-3002