Spatially Extended Laser Light Scattering Diagnostics with Angular Spectral Filters

  • High total signal transmission
  • Flexibility of setup
  • Easy extension of 1D measurement

Abstract

This invention realizes 1D measurement with a greatly improved resolution of ~10 um based on the first principle of rejection characteristics of the angular spectral filters, which enable a point measurement system to do a 1D measurement with the exact same setup. The demonstration successfully shows the measurable length can be extended by simply implementing an additional filter, and the technique observed a sharp gradient of plasma properties over a few hundred um of a thin plasma column. This invention can be helpful in characterizing various microsize industrial test articles. The capability to extend the measurable length is highly useful for diagnosing larger-scale test articles as well.

Advantages

Compact experimental setup with high total signal transmission and high spatial resolu-tion

Great flexibility of a setup for a specific test article and environment

Easy extension of 1D measurement length with additional filters

Potential Applications

This invention realizes 1D measurement with a greatly improved resolution of ~10 um based on the first principle of rejection characteristics of the angular spectral filters, which enable a point measurement system to do a 1D measurement with the exact same setup.

The demonstration successfully shows the measurable length can be extended by simply implementing an additional filter, and the technique observed a sharp gradient of plasma properties over a few hundred um of a thin plasma column.

This invention can be helpful in characterizing various microsize industrial test articles. The capability to extend the measurable length is highly useful for diagnosing larger-scale test articles as well.

Contact Information

Name: Shyamala Rajagopalan

Email: SRajagopalan@tamu.edu

Phone: 979-862-3002